Clean room
Clean room
- Classification: ISO 6
- Air change rate: 150 h-1
- Room area: 3,1 × 2,3 m
- Lighting: possibility of blocking the wavelengths under 470 nm (yellow light)
Equipment:
- laser photolitography MIDALIX and PC,
- ultrasonic cleaner Sonis 4 – Iskra PIO,
- spin coater WS-650MZ-23NPPB,
- laboratory heater.
Questions?
Do not hesitate to contact us via e-mail or by telephone. You can also visit us at the Faculty of Mechanical Engineering in Ljubljana
Aškerceva ul. 6
1000 Ljubljana
Slovenia