Clean room

Clean room

  • Classification: ISO 6
  • Air change rate: 150 h-1
  • Room area: 3,1 × 2,3 m
  • Lighting: possibility of blocking the wavelengths under 470 nm (yellow light)

Equipment:

  • laser photolitography MIDALIX and PC,
  • ultrasonic cleaner Sonis 4 – Iskra PIO,
  • spin coater WS-650MZ-23NPPB,
  • laboratory heater.

FAQ

Questions?

Do not hesitate to contact us via e-mail or by telephone. You can also visit us at the Faculty of Mechanical Engineering in Ljubljana

003861-4771-418
lahde@fs.uni-lj.si

Aškerceva ul. 6
1000 Ljubljana
Slovenia