Photolithography

Laser litography

With the help of lithography machines light sensitive polymers or photoresists are exposed by UV light source and developed with chemical means to form 3D relief images or objects on carrying substrate.

Strojna fakulteta-LADHE
MIDALIX maskless litography systems

 Substrate size, mm                                               from sub-millimeter to 100 x 100 x 10

Supported photoresists                                       all common photoresists

Laser wavelength, nm                                          375 or 405

Laser beam spot size, µm                                    1 and 3 (software-selectable)

Writing resolution (beam positioning)            true sub-nanometer

Writing speed (spots per second), Hz              100,000

Minimum structure size, µm                             <1

Structure aspect ratio                                          more than 1:20

Multilayer alignment accuracy, µm                 0.5

Data input formats                                             DXF, BMP

Intuitive CAD software for design, alignment, advanced anchoring and exposure control
Integrated optical monochrome or color microscope for inspection and alignment
 
Technical Data

Operating temperature, °C                                 21.5 ± 1.5

Operating relative humidity, %                        <80, non-condensing

System dimensions (W x D x H), mm              650 x 626 x 522

System weight, kg                                                 77

Electrical supply voltage                                     110-230 VAC, 50/60 Hz

Power consumption, VA                                     <120

Hardware/software requirements        

Windows 10 / 8.1 / 8, 64 bit, 3 GHz processor with SSE2 or higher, 4 GB of RAM and 16 GB available hard disk space

Chiller data
133 x 483 x 559 mm³ (19” rack, 3U), 15 kg, 250 W cooling / heating capacity
The DaLI system is shipped with the chiller, all connecting cables, coolant hoses and the proprietary DaLI software.

FAQ

Questions?

Do not hesitate to contact us via e-mail or by telephone. You can also visit us at the Faculty of Mechanical Engineering in Ljubljana

003861-4771-418
lahde@fs.uni-lj.si

Aškerceva ul. 6
1000 Ljubljana
Slovenia